Coating processes
Coating by vapor, gas, or smoke
Organic coating applied by vapor, gas, or smoke
Inventor
active
Fluoropolymer interlayer dielectric by chemical vapor...
Low κ dielectric inorganic/organic hybrid films and...
Low κ dielectric inorganic/organic hybrid films and...
Low &kgr; dielectric inorganic/organic hybrid films and...
Method of making low .kappa. dielectric inorganic/organic hybrid
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