4. Photocopying
  5. Projection printing and copying cameras
  6. Illumination systems or details

Erik Loopstra

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Active faceted mirror system for lithography

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Apparatuses and methods for changing an intensity...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Correcting variations in the intensity of light within an...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Optical apparatus for use in photolithography

Optical: systems and elements – Lens – With support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2977998

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