4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Eric Shero

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ALD of metal silicate films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Heat lamps for zone heating

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
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Low temperature method of forming a gate stack with a high k...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method for controlling the sublimation of reactants

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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System for controlling the sublimation of reactants

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
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Profile ID: LFUS-PAI-P-2204694

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