System for controlling the sublimation of reactants

Details System for controlling the sublimation of reactants System for controlling the sublimation of reactants

2003-06-16

2009-10-13

Zervigon, Rudy (Department: 1792)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C156S345290

Reexamination Certificate

active

07601225

ABSTRACT:
An apparatus and method improves heating of a solid precursor inside a sublimation vessel. In one embodiment, inert, thermally conductive elements are interspersed among units of solid precursor. For example the thermally conductive elements can comprise a powder, beads, rods, fibers, etc. In one arrangement, microwave energy can directly heat the thermally conductive elements.

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