Method for controlling the sublimation of reactants

Details Method for controlling the sublimation of reactants Method for controlling the sublimation of reactants

2008-07-10

2010-12-14

Cleveland, Michael (Department: 1712)

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

C427S248100, C118S726000, C118S727000, C392S342000, C392S386000, C392S388000, C422S243000

Reexamination Certificate

active

07851019

ABSTRACT:
An apparatus and method improves heating of a solid precursor inside a sublimation vessel. In one embodiment, inert, thermally conductive elements are interspersed among units of solid precursor. For example the thermally conductive elements can comprise a powder, beads, rods, fibers, etc. In one arrangement, microwave energy can directly heat the thermally conductive elements.

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