4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Eric Englhardt

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Apparatus for constructing an oxidized film on a semiconductor w

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method for constructing a film on a semiconductor wafer

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Reexamination Certificate

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Method of retaining a substrate during a substrate...

Material or article handling – Process
Reexamination Certificate

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Method of retaining a substrate during a substrate...

Material or article handling – Process
Reexamination Certificate

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Methods and apparatus for purging a substrate carrier

Coating apparatus – Work holders – or handling devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1123612

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