Methods and apparatus for purging a substrate carrier

Details Methods and apparatus for purging a substrate carrier Methods and apparatus for purging a substrate carrier

2007-01-11

2011-12-13

Moore, Karla (Department: 1716)

Coating apparatus

Work holders, or handling devices

C118S715000, C118S733000, C156S345310, C414S935000, C414S937000, C206S710000, C206S711000, C206S712000

Reexamination Certificate

active

08074597

ABSTRACT:
In a first aspect, a substrate carrier is provided that includes an enclosure adapted to be sealable and to house at least one substrate. The substrate carrier includes a first port leading into the enclosure and adapted to allow a flow of gas into the enclosure while the substrate carrier is closed. Numerous other aspects are provided.

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