4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Enh Fieler

Examiner

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Examiner

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Apparatus for the stabilization of halogen-doped films through t

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Equipment for forming a glue layer of an opening

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Gas recovery unit

Coating apparatus – Gas or vapor deposition
Patent

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Ion plating apparatus that prevents wasteful consumption of evap

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Plasma processing apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Profile ID: LFUS-PAI-P-805457

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