4. Optics: measuring and testing
  5. Of light reflection

Elliot Burke

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Apparatus for imaging metrology

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Apparatus for imaging metrology

Optics: measuring and testing – Shape or surface configuration
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Beam segmentor for enlarging viewing aperture of microdisplay

Optical: systems and elements – Single channel simultaneously to or from plural channels – By partial reflection at beam splitting or combining surface
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Wafer metrology apparatus and method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Wafer metrology apparatus and method

Optics: measuring and testing – Of light reflection
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2608279

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