Apparatus for imaging metrology

Details Apparatus for imaging metrology Apparatus for imaging metrology

2006-05-09

2006-05-09

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

C356S237200, C356S455000, C356S630000

Reexamination Certificate

active

07042580

ABSTRACT:
This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.

REFERENCES:
patent: 4659220 (1987-04-01), Bronte et al.
patent: 4869593 (1989-09-01), Biegen
patent: 4899055 (1990-02-01), Adams
patent: 5042949 (1991-08-01), Greenberg et al.
patent: 5191393 (1993-03-01), Hignette et al.
patent: 5258823 (1993-11-01), Akamatsu
patent: 5291269 (1994-03-01), Ledger
patent: 5486701 (1996-01-01), Norton et al.
patent: 5517032 (1996-05-01), Imani
patent: 5604344 (1997-02-01), Finarov
patent: 5616063 (1997-04-01), Okumura et al.
patent: 5695601 (1997-12-01), Kodera et al.
patent: 5747813 (1998-05-01), Norton et al.
patent: 5757502 (1998-05-01), Weling
patent: 5825498 (1998-10-01), Thakur et al.
patent: 5835225 (1998-11-01), Thakur
patent: 5872633 (1999-02-01), Holzapfel et al.
patent: 5943122 (1999-08-01), Holmes
patent: 5948203 (1999-09-01), Wang
patent: 5957749 (1999-09-01), Finarov
patent: 6052188 (2000-04-01), Fluckiger et al.
patent: 6108091 (2000-08-01), Pecen et al.
patent: 6108092 (2000-08-01), Sandhu
patent: 6111634 (2000-08-01), Pecen et al.
patent: 6120348 (2000-09-01), Fujita et al.
patent: 6142855 (2000-11-01), Nyui et al.
patent: 6157450 (2000-12-01), Marchese-Ragona et al.
patent: 6184984 (2001-02-01), Lee et al.
patent: 6406641 (2002-06-01), Golzarian
patent: 6413867 (2002-07-01), Sarfaty et al.
patent: 0 881 484 (1998-12-01), None
patent: 2 314 037 (1997-12-01), None
patent: WO 98/37404 (1998-08-01), None
patent: WO 99/01797 (1999-01-01), None

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