4. Gas separation: processes
  5. Selective diffusion of gases
  6. Selective diffusion of gases through substantially solid...

Elizabeth T. Webster

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Metal oxide membranes for gas separation

Gas separation: processes – Selective diffusion of gases – Selective diffusion of gases through substantially solid...
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Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
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Single and multilevel rework

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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