4. Material or article handling
  5. Movable rack having superposed, charge-supporting elements,...
  6. Rack moved vertically by elevating means

Edward F. Boyle

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Apparatus for handling sensitive material such as semiconductor

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Wafer centration device

Material or article handling – Article reorienting device – Orienter has article gripping means
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Wafer monitoring device

Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
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Profile ID: LFUS-PAI-P-865230

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