Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1986-03-13
1988-05-24
Spar, Robert J.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414225, 414331, B65G 6534, B65H 508
Patent
active
047462566
ABSTRACT:
An apparatus for handling or inspecting a sensitive material such as a semiconductor wafer or mask in a self-contained environment, such that the apparatus can be used outside a clean room. The apparatus incorporates a standardized mechanical interface for transferring the wafers or other sensitive material to and from the apparatus in a box having a cover, a bottom, a latch assembly releasably connecting and sealing the cover to the bottom, and a carrier such as a cassette for supporting the wafers. The apparatus includes a base and a canopy attached to the base so as to create an enclosed space between the base and canopy. The canopy includes a port door releasably secured to the canopy, the port door including an upper surface adapted for supporting the bottom of the box. The apparatus also includes a manipulator and electronic control for controlling the manipulator. The manipulator is operable when the box has been positioned on the port door for moving the cassette out of the cover, and is operable when the cassette has been moved out of the cover for transferring wafers between the cassette to a working area, such as the viewing stage of a microscope assembly, within the enclosed space. A novel latch actuator is provided, the latch actuator being operable when the box is positioned on the port door for releasing the port door from the canopy, releasing the bottom from the cover, and securing the cover to the canopy. The manipulator includes a robot assembly having a tip for engaging the semiconductor material, and an elevator for moving the robot assembly along a vertical Z axis. The robot assembly also functions to support the port door, box bottom and cassette to lower such components out of the cover.
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Mihir Parikh and Ulrich Kaempf, "SMIF: A Technology for Wafer Cassette Transfer in VLSI Manufacturing", brochure from Hewlett Packard Laboratories, Palo Alto, CA.
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Boyle Edward F.
Wilkins G. Scott
Millman Stuart J.
Roboptek, Inc.
Spar Robert J.
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