Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
Patent
1987-05-15
1990-01-23
Werner, Frank E.
Material or article handling
Movable rack having superposed, charge-supporting elements,...
Rack moved vertically by elevating means
414217, 414416, 414222, 414226, 414273, 414274, 414609, 901 47, G01P 1300
Patent
active
048954861
ABSTRACT:
A monitoring device for determining the presence or absence of wafer-like objects in a carrier having a plurality of shelves, each shelf being constructed to support one such object in an orientation normal to a carrier axis. The monitoring device may advantageously be used in an apparatus for handling wafer-like objects in a self-contained environment. The monitoring device includes a first detector capable of detecting movement of a body past the detector and generating a corresponding first signal. A translation member is physically coupled to the carrier, such that movement of the translation member results in movement of the carrier. The translation member is moved such that the carrier, and any objects such as wafers supported in the carrier, move along the carrier axis past the first detector. As the translation member moves, a position signal is generated, such that the position signal encodes the position of the translation member. The first detection signal and the position signal are processed to determine the presence or absence of an object on each shelf, and the position of each object. A second detector may be employed to determine whether each object is fully seated in its shelf.
REFERENCES:
patent: 3851972 (1974-12-01), Smith et al.
patent: 3902615 (1975-09-01), Levy et al.
patent: 4343584 (1982-10-01), Hudgins
patent: 4458152 (1984-07-01), Bonora
patent: 4493606 (1985-01-01), Foulke et al.
patent: 4534389 (1985-08-01), Tullis
patent: 4744713 (1988-05-01), Hrovath
Baker Gregory G.
Boyle Edward F.
Roboptek, Inc.
Werner Frank E.
LandOfFree
Wafer monitoring device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Wafer monitoring device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer monitoring device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-643012