Material or article handling – Article reorienting device – Orienter has article gripping means
Patent
1987-05-15
1989-11-14
Werner, Frank E.
Material or article handling
Article reorienting device
Orienter has article gripping means
414754, B65G 4724
Patent
active
048803480
ABSTRACT:
A device for centering an object and rotating it to a desired angular position relative to a discerning feature. The centration device is particularly adapted for use as a station in a semiconductor wafer handling apparatus, and includes a rotatably driven chuck on which a wafer may be placed by a robot manipulator arm. The perimeter of the wafer is rotated between a light source and a linear array of charge coupled device elements, casting a shadow on the light sensitive elements as the wafer is rotated. A processor connected to the charge couple devices and to an angular position encoder on a shaft of the chuck rotating the wafer is operative to collect data relating the displacement of the perimeter from a reference point to the angular position of the wafer. The processor determines from the data a distance over which the wafer should be shifted on the chuck to center it relative to the reference point. Once the robot manipulator arm has centered the wafer, a minimum displacement of a point on the perimeter corresponding to a flat or notch on the wafer is located and positioned at the desired angular orientation.
REFERENCES:
patent: 4024944 (1977-05-01), Adams et al.
patent: 4425075 (1984-01-01), Quinn
patent: 4457664 (1984-07-01), Judell et al.
patent: 4752898 (1988-06-01), Koenig
patent: 4770600 (1988-09-01), Ishikawa
Baker Gregory G.
Boyle Edward F.
Krizek Janice L.
Roboptek, Inc.
Werner Frank E.
LandOfFree
Wafer centration device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Wafer centration device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer centration device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1849986