4. Optical: systems and elements
  5. Deflection using a moving element
  6. By moving a reflective element

Edward C. Fisher

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Encapsulation for particle entrapment

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor
Reexamination Certificate

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Encapsulation for particle entrapment

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package
Reexamination Certificate

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Method for lubricating MEMS components

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Method of passivating a micromechanical device within a hermetic

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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Profile ID: LFUS-PAI-P-1254638

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