4. Coherent light generators
  5. Particular active media
  6. Gas

Eduard Kugler

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Apparatus for reactive sputter coating at least one article

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Gas inlet arrangement

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Information carrier, method for producing same

Stock material or miscellaneous articles – Circular sheet or circular blank
Patent

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Method for reactive sputter coating at least one article

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Method of controlling a treatment process and vacuum treatment a

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-160386

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