4. Fluid handling
  5. Processes
  6. Involving pressure control

Eclipse Ion Technology, Inc.

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Ion beam fast parallel scanning having dipole magnetic lens with

Radiant energy – Invisible radiant energy responsive electric signalling – Flow metering
Patent

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Linear gas bearing with integral vacuum seal for use in serial p

Bearings – Linear bearing – Fluid bearing
Patent

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Method and apparatus for venting vacuum processing equipment

Fluid handling – Processes – Involving pressure control
Patent

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