Ion beam fast parallel scanning having dipole magnetic lens with

Details Ion beam fast parallel scanning having dipole magnetic lens with Ion beam fast parallel scanning having dipole magnetic lens with

1986-08-25

1988-05-17

Anderson, Bruce C.

Radiant energy

Invisible radiant energy responsive electric signalling

Flow metering

250396ML, 2504922, H01J 314, H01J 320

Patent

active

047452811

ABSTRACT:
An ion source provides ions that pass through an analyzing magnet, image slit, and magnetic quadrupole lenses before entering a beam deflector. The deflected ion beam enters a magnetic field established by a dipole magnetic lens of rectangular cross section in planes parallel to the beam plane including the scanned ion beam, and having a variable width gap in a plane perpendicular to the beam plane that provides a parallel scanned ion beam. The parallel scanned ion beam enters a slot-shaped acceleration columnn and then scans a target.

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IBM Technical Disclosure Bulletin, vol. 19, No. 4, Sep. 1976, "Fine Ion Beam Optical System," J. H. Keller, et al.
The Review of Scientific Instruments, vol. 35, No. 3, 278-287, Mar. 1964, "Effect of Extended Fringing Fields on Ion-Focusing Properties of Deflecting Magnets," by Harold A. Enge.

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