Linear gas bearing with integral vacuum seal for use in serial p

Details Linear gas bearing with integral vacuum seal for use in serial p Linear gas bearing with integral vacuum seal for use in serial p

1986-10-22

1988-02-23

Levy, Stuart S.

Bearings

Linear bearing

Fluid bearing

277 3, 277 71, 277 79, 384 16, 384100, 384114, 384132, F16C 3206, F16C 3372, F16J 1516, F16J 1540

Patent

active

047266899

ABSTRACT:
A high vacuum ion implantation chamber has a lower wall formed with an opening accommodating a depending sleeve through which a shaft passes supporting a substrate support platform at the top and connectable to external linear and rotary drives at the bottom. The sleeve is formed with four axially spaced annular grooves each coupled to a respective vacuum pump that maintains the annular grooves at respective pressures that progressively increase for grooves further away from the vacuum chamber bottom wall. A lowermost annular groove functions as an exhaust along with the region surrounding the shaft at the bottom of the sleeve. The sleeve also includes an air inlet. The gravity forces acting upon the shaft and platform assembly are counterbalanced by the differential pressure acting over the shaft area between the high vacuum chamber and the ambient surroundings.

REFERENCES:
patent: 2899245 (1959-08-01), Michel
patent: 2908515 (1959-10-01), Schellens
patent: 3734580 (1973-05-01), Piscitelli
patent: 3949996 (1976-04-01), Inoue et al.
patent: 4014555 (1977-03-01), Jacottet
patent: 4118042 (1978-10-01), Booth
patent: 4191385 (1980-03-01), Fox et al.
patent: 4361332 (1982-11-01), Logan et al.
patent: 4544317 (1985-10-01), Carter

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