Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2011-06-21
2011-06-21
Vanore, David A (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S455110, C362S345000
Reexamination Certificate
active
07964858
ABSTRACT:
A reflector for an ultraviolet lamp can be used in a substrate processing apparatus. The reflector comprises a longitudinal strip extending the length of the ultraviolet lamp. The longitudinal strip has a curved reflective surface and comprises a plurality of through holes to direct a coolant gas toward the ultraviolet lamp. A chamber that uses an ultraviolet lamp module with the reflector, and a method of ultraviolet treatment are also described.
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Baluja Sanjeev
Ho Dustin W.
Kaszuba Andrzej
Nguyen Tuan Anh
Nowak Thomas
Applied Materials Inc.
Janah & Associates
Vanore David A
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