4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Duk-Ho Hong

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Chemical mechanical polishing apparatus

Abrading – Precision device or process - or with condition responsive... – Controlling temperature
Reexamination Certificate

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Flexible membrane for a polishing head and chemical...

Abrading – Machine – Rotary tool
Reexamination Certificate

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Method and apparatus for polishing a copper layer and method...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2895969

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