Abrading – Machine – Rotary tool
Reexamination Certificate
2007-01-23
2007-01-23
Wilson, Lee D. (Department: 3723)
Abrading
Machine
Rotary tool
C451S285000, C451S041000, C451S290000, C451S398000, C279S003000
Reexamination Certificate
active
11044373
ABSTRACT:
A flexible membrane for a polishing head and a chemical mechanical polishing (CMP) apparatus having the same are provided. The flexible membrane for a polishing head includes a compressing plate having a first face and a second face opposite to the first face. The first face of the compressing plate holds a substrate with a vacuum provided thereto and compresses the substrate on a polishing pad. The second face of the compressing plate is combined with a supporter of the polishing head. The second face and the supporter define a space to which the vacuum for holding the substrate and a first pneumatic pressure for compressing the substrate are applied. A dividing member combined with the supporter is formed on the second face. The dividing member divides the space into at least two regions. A pneumatic pressure-introducing portion is formed at the dividing member. A second pneumatic pressure is provided to the compressing plate through the pneumatic pressure-introducing portion.
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European Patent Office Communication.
Han Sang-Cheol
Hong Duk-Ho
Koo Ja-Eung
Park Moo-Yong
F.Chau & Associates LLC
Ojini Anthony
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