Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Insulative material deposited upon semiconductive substrate
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Deposition-selective etch-deposition process for dielectric...
In-situ-etch-assisted HDP deposition
In-situ-etch-assisted HDP deposition using SiF 4
In-situ-etch-assisted HDP deposition using SiF4 and hydrogen
Post deposition plasma treatment to increase tensile stress...
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