4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Dongqing Li

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Disposable reactor module and detection system

Chemistry: molecular biology and microbiology – Apparatus – Bioreactor
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HDP-CVD dep/etch/dep process for improved deposition into...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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HDP-CVD deposition process for filling high aspect ratio gaps

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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HDP-CVD deposition process for filling high aspect ratio gaps

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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HDP-CVD deposition process for filling high aspect ratio gaps

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Profile ID: LFUS-PAI-P-2611981

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