4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Responsive to non-electrical signal
  6. Magnetic field

Dong-wook Kim

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Electron beam lithography apparatus using a patterned emitter

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate

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Electron beam lithography apparatus using a patterned...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Electron projection lithography apparatus using secondary...

Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate

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Electron-beam focusing apparatus and electron-beam...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Emitter for electron-beam projection lithography system and...

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Low workfunction layer for electron emission
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2750920

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