Friction sensor for polishing system

Details Friction sensor for polishing system Friction sensor for polishing system

2006-11-22

2010-06-01

Wilson, Lee D (Department: 3727)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C451S285000, C451S288000

Reexamination Certificate

active

07727049

ABSTRACT:
A system. method and apparatus to monitor a frictional coefficient of a substrate undergoing polishing is described. A polishing pad assembly includes a polishing layer including a polishing surface, and a substrate contacting member flexibly coupled to the polishing layer having a top surface to contact an exposed surface of a substrate. At least a portion of the top surface is substantially coplanar with the polishing surface. A sensor is provided to measure a lateral displacement of the substrate contacting member. Some embodiments may provide accurate endpoint detection during chemical mechanical polishing to indicate the exposure of an underlying layer.

REFERENCES:
patent: 5036015 (1991-07-01), Sandhu et al.
patent: 5069002 (1991-12-01), Sandhu et al.
patent: 5486129 (1996-01-01), Sandhu et al.
patent: 5597341 (1997-01-01), Kodera et al.
patent: 5623096 (1997-04-01), Bandyopadhyay
patent: 5639388 (1997-06-01), Kimura et al.
patent: 5647952 (1997-07-01), Chen
patent: 5700180 (1997-12-01), Sandhu et al.
patent: 5738562 (1998-04-01), Doan et al.
patent: 5743784 (1998-04-01), Birang et al.
patent: 5830041 (1998-11-01), Takahashi et al.
patent: 5846882 (1998-12-01), Birang
patent: 5851135 (1998-12-01), Sandhu et al.
patent: 5860847 (1999-01-01), Sakurai et al.
patent: 5914275 (1999-06-01), Kodera et al.
patent: 5948205 (1999-09-01), Kodera et al.
patent: 6046111 (2000-04-01), Robinson
patent: 6120347 (2000-09-01), Sandhu et al.
patent: 6123609 (2000-09-01), Satou
patent: 6191037 (2001-02-01), Robinson et al.
patent: 6206754 (2001-03-01), Moore
patent: 6257953 (2001-07-01), Gitis et al.
patent: 6280292 (2001-08-01), Sato et al.
patent: 6283829 (2001-09-01), Molnar
patent: 6306008 (2001-10-01), Moore
patent: 6340434 (2002-01-01), Mizuno et al.
patent: 6428389 (2002-08-01), Sato et al.
patent: 6492273 (2002-12-01), Hofmann et al.
patent: 6520834 (2003-02-01), Marshall
patent: 6572444 (2003-06-01), Ball et al.
patent: 6623334 (2003-09-01), Birang et al.
patent: 6634924 (2003-10-01), Ono et al.
patent: 6699791 (2004-03-01), Hofmann et al.
patent: 6711829 (2004-03-01), Sano et al.
patent: 6773332 (2004-08-01), Moore
patent: 6840840 (2005-01-01), Moore
patent: 6916225 (2005-07-01), Sugiyama et al.
patent: 6969297 (2005-11-01), Moore et al.
patent: 7052366 (2006-05-01), Wolf
patent: 2001/0008476 (2001-07-01), Imamura
patent: 2001/0012750 (2001-08-01), Moore
patent: 2002/0016131 (2002-02-01), Sandhu et al.
patent: 2002/0037681 (2002-03-01), Gitis et al.
patent: 2002/0090889 (2002-07-01), Crevasse et al.
patent: 2005/0136800 (2005-06-01), Miller et al.
patent: 2006/0003673 (2006-01-01), Moore
patent: 2007/0087662 (2007-04-01), Benvegnu et al.
patent: 1211487 (1999-03-01), None
patent: 1425190 (2003-06-01), None
patent: 0771611 (1997-07-01), None
patent: 2000065720 (2000-03-01), None
Applied Materials, Inc., International Search Report and the Written Opinion of PCT/US2007/085305 dated Jul. 1, 2008, 10 pages.

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