Determining physical property of substrate

Details Determining physical property of substrate Determining physical property of substrate

2008-10-16

2010-06-29

Chowdhury, Tarifur R. (Department: 2886)

Optics: measuring and testing

Dimension

Thickness

Reexamination Certificate

active

07746485

ABSTRACT:
A method of determining a physical property of a substrate includes recording a first spectrum obtained from a substrate, the first spectrum being obtained during a polishing process that alters a physical property of the substrate. The method includes identifying, in a database, at least one of several previously recorded spectra that is similar to the recorded first spectrum. Each of the spectra in the database has a physical property value associated therewith. The method includes generating a signal indicating that a first value of the physical property is associated with the first spectrum, the first value being determined using the physical property value associated with the identified previously recorded spectrum in the database. A system for determining a physical property of a substrate includes a polishing machine, an endpoint determining module, and a database.

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