Iso-reflectance wavelengths

Details Iso-reflectance wavelengths Iso-reflectance wavelengths

2006-10-10

2006-10-10

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Dimensional determination

C702S159000

Reexamination Certificate

active

07120553

ABSTRACT:
A method of measuring a physical characteristic of a patterned substrate comprises determining a wavelength where a first reflectance from a patterned substrate equals a second reflectance from the patterned substrate. The first and second reflectances are generated from substrate regions having different pattern densities. A physical characteristic value that is associated with the determined wavelength is identified. The value identification may be done by looking up the determined wavelength in a database, for example by referring to a graph.

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