4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Do-haing Lee

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Etching apparatus using neutral beam

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With means to generate and to direct a reactive ion etchant...
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Layer-by-layer etching apparatus using neutral beam and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Layer-by-layer etching apparatus using neutral beam and...

Coating apparatus – Gas or vapor deposition – With treating means
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Methods of manufacturing non-volatile memory devices having...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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