4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Derrek Andrew Russell

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High target utilization magnetic arrangement for a truncated...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Magnetically enhanced capacitive plasma source for ionized...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Magnetically enhanced capacitive plasma source for ionized...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Method and apparatus for ionized physical vapor deposition

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Method and apparatus for ionized physical vapor deposition

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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