4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

DCG Systems, Inc.

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Apparatus and method for detecting photon emissions from...

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate

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Apparatus and method for optical interference fringe based...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Apparatus and method for probing integrated circuits using...

Optics: measuring and testing – By polarized light examination – Of surface reflection
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Apparatus and method for probing integrated circuits using...

Optics: measuring and testing – By polarized light examination – Of surface reflection
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Bi-convex solid immersion lens

Optical: systems and elements – Lens – Including a nonspherical surface
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