4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. Plural fluid growth steps with intervening diverse operation

David James Eaglesham

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Process for controlling dopant diffusion in a semiconductor laye

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Plural fluid growth steps with intervening diverse operation
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Process for controlling dopant diffusion in a semiconductor laye

Active solid-state devices (e.g. – transistors – solid-state diode – With specified dopant
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Process for device fabrication using a high-energy boron implant

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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