4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

David C. Brandt

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Gas management system for a laser-produced-plasma EUV light...

Radiant energy – Fluent material containment – support or transfer means – With irradiating source or radiating fluent material
Reexamination Certificate

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System managing gas flow between chambers of an extreme...

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Systems and methods for target material delivery in a laser...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2260598

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