Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2011-01-18
2011-01-18
Berman, Jack I (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S50400H, C250S493100, C250S492100, C250S354100, C250S372000, C250S503100, C359S359000, C359S333000, C156S345240, C156S345500, C378S034000
Reexamination Certificate
active
07872245
ABSTRACT:
Devices are disclosed herein which may comprise an EUV reflective optic having a surface of revolution that defines a rotation axis and a circular periphery. The optic may be positioned to incline the axis at a nonzero angle relative to a horizontal plane, and to establish a vertical projection of the periphery in the horizontal plane with the periphery projection bounding a region in the horizontal plane. The device may further comprise a system delivering target material, the system having a target material release point that is located in the horizontal plane and outside the region, bounded by the periphery projection and a system generating a laser beam for irradiating the target material to generate an EUV emission.
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Bowering Norbert R.
Brandt David C.
Bykanov Alexander N.
Ershov Alexander I.
Fomenkov Igor V.
Berman Jack I
Cymer Inc.
Hillman Mattthew K.
Sahu Meenakshi S
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