Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-12-14
2010-10-12
Berman, Jack I (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S493100, C250S492200, C378S034000, C315S111010, C315S111210
Reexamination Certificate
active
07812329
ABSTRACT:
A gas flow management system may comprise a first and second enclosing walls at least partially surrounding first and second respective spaces; a system generating plasma in the first space, the plasma emitting extreme ultraviolet light; an elongated body restricting flow from the first space to the second space, the body at least partially surrounding a passageway and having a first open end allowing EUV light to enter the passageway from the first space and a second open end allowing EUV light to exit the passageway into the second space, the body shaped to establish a location having a reduced cross-sectional area relative to the first and second ends; and a flow of gas exiting an aperture, the aperture positioned to introduce gas into the passageway at a position between the first end of the body and the location having a reduced cross-sectional area.
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Brandt David C.
Bykanov Alexander N.
Fomenkov Igor V.
Partlo William N.
Berman Jack I
Cymer Inc.
Hillman Matthew K.
Ippolito Rausch Nicole
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