4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Darwin A. Clampitt

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Biasable isolation regions using epitaxially grown silicon...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate

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Buried digit spacer separated capacitor array

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Buried digit spacer separated capacitor array

Semiconductor device manufacturing: process – Making passive device
Reexamination Certificate

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Buried digit spacer-separated capacitor array

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Cell capacitors, memory cells, memory arrays, and method of fabr

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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