4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Danny C. Halverson

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Magnetically attached sputter targets

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Magnetron sputtering source

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Method of making segmented pyrolytic graphite sputtering targets

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor
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