Method of making segmented pyrolytic graphite sputtering targets

Details Method of making segmented pyrolytic graphite sputtering targets Method of making segmented pyrolytic graphite sputtering targets

1993-04-05

1994-02-08

Aftergut, Jeff H.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156153, 156269, 156281, 1562726, 20429812, 20429813, B32B 3100

Patent

active

052845397

ABSTRACT:
Anisotropic pyrolytic graphite wafers are oriented and bonded together such that the graphite's high thermal conductivity planes are maximized along the back surface of the segmented pyrolytic graphite target to allow for optimum heat conduction away from the sputter target's sputtering surface and to allow for maximum energy transmission from the target's sputtering surface.

REFERENCES:
patent: 4382113 (1983-05-01), Schwartz et al.
patent: 4551216 (1985-11-01), Argyo
patent: 4913762 (1990-04-01), Kittler

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