4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Having liquid and vapor etching steps

Daniel Koehler

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Etch process for recessing polysilicon in trench structures

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
Reexamination Certificate

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Integrated circuit, intermediate structure and a method of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for filling trench and relief geometries in...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Solenoid valve

Valves and valve actuation – Electrically actuated valve – Including solenoid
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2697311

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