4. Optics: measuring and testing
  5. By light interference

Cymer, Inc.

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Automatic gas control system for a gas discharge laser

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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Compact ductless cooling with heat exchangers

Heat exchange – With retainer for removable article – Electrical component
Reexamination Certificate

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Control system for a two chamber gas discharge laser

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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Gas discharge MOPA laser spectral analysis module

Optics: measuring and testing – By light interference – Spectroscopy
Reexamination Certificate

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Gas discharge MOPA laser spectral analysis module

Optics: measuring and testing – By light interference
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