Automatic gas control system for a gas discharge laser

Details Automatic gas control system for a gas discharge laser Automatic gas control system for a gas discharge laser

2005-11-08

2005-11-08

Lee, Wilson (Department: 2821)

Coherent light generators

Particular active media

Gas

C372S056000, C372S057000, C372S058000, C372S059000, C372S060000, C372S061000

Reexamination Certificate

active

06963595

ABSTRACT:
An automatic F2laser gas control, for a modular high repetition rate ultraviolet gas discharge laser. The laser gas control includes techniques, monitors, and processor for monitoring the F2consumption rates through the operating life of the laser system. These consumption rates are used by a processor programmed with an algorithm to determine F2injections needed to maintain laser beam quality within a delivery range. Preferred embodiments include F2controls for a two-chamber MOPA laser system.

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