Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
Inventor
active
Conversion of amorphous layer produced during IMP Ti deposition
HDP-based ILD capping layer
HDP-based ILD capping layer
HDP-based ILD capping layer
Method for forming a TiN layer on top of a metal silicide...
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