Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
Inventor
active
Incorporation of nitrogen into high k dielectric film
Incorporation of nitrogen into high k dielectric film
Incorporation of nitrogen into high k dielectric film
Low temperature method of forming a gate stack with a high k...
Plasma etch resistant coating and process
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Profile ID: LFUS-PAI-P-2428314