4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. Fluid growth from liquid combined with subsequent diverse...

Christoph Striebel

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Method and apparatus for thermally treating substrates

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from liquid combined with subsequent diverse...
Reexamination Certificate

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Method and apparatus for thermally treating substrates

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from liquid combined with subsequent diverse...
Reexamination Certificate

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Method and device for thermal treatment of substrates

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Process for determining the temperature of a semiconductor...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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