Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2003-11-28
2008-08-12
Jarrett, Ryan A (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S031000, C700S207000
Reexamination Certificate
active
07412299
ABSTRACT:
The invention relates to a process for determining at least one state variable from a model of an RTP system by means of at least one measurement signal measured on the RTP system—the measurement value—which has a dependency upon the state variable to be determined, and a measurement value forecast by means of the model—the forecast value—, whereby the measurement value and the forecast value respectively comprise components of a constant and a changeable portion, and whereby respectively at least the changeable portion is established, separated by a filter, so as to form a first difference between the changeable portion of the measurement value and the changeable portion of the measurement value forecast by the model, parameter adaptation of at least one model parameter by recirculation of the first difference in the model with the aim of adapting the model behavior to variable system parameters, forming of a second difference from the measurement value and the forecast value or from the measurement value adjusted by the changeable portion and the adjusted forecast value, state correction of a state of the model system by recirculation of the second difference in the model, with the aim of bringing the state of the model system into correspondence with that of the real system, and measurement of the at least one state variable on the model.
REFERENCES:
patent: 5442727 (1995-08-01), Fiory
patent: 5583780 (1996-12-01), Kee et al.
patent: 5783804 (1998-07-01), Burke et al.
patent: 5837555 (1998-11-01), Kaltenbrunner et al.
patent: 5872889 (1999-02-01), Kaltenbrunner et al.
patent: 5895596 (1999-04-01), Stoddard et al.
patent: 6051512 (2000-04-01), Sommer et al.
patent: 6056434 (2000-05-01), Champetier
patent: 6169271 (2001-01-01), Savas et al.
patent: 6191392 (2001-02-01), Hauf et al.
patent: 6310328 (2001-10-01), Gat
patent: 6369363 (2002-04-01), Hauf et al.
patent: 6373033 (2002-04-01), de Waard et al.
patent: 2002/0107604 (2002-08-01), Riley et al.
patent: 2003/0166317 (2003-09-01), Blersch et al.
patent: 198 52 321 (1999-06-01), None
patent: 101 56 441 (2002-11-01), None
patent: WO 00/34986 (2000-06-01), None
DE 198 52 320, not published, Germany.
Hauf Markus
Merkl Christoph
Striebel Christoph
Dority & Manning P.A.
Jarrett Ryan A
Mattson Thermal Products GmbH
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