Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
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Amplification of resist structures of fluorinated resist...
CHEMICALLY AMPLIFIED PHOTORESIST AND PROCESS FOR STRUCTURING...
Negative resist process with simultaneous development and...
Photoresist based on polycondensates and having an increased...
Photoresist suitable for use in 157 nm photolithography and...
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