4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Robot control

Chris Gage

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Closed loop temperature heat up and control utilizing...

Heating – Heating or heat retaining work chamber structure
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High throughput method of in transit wafer position...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Robot control
Reexamination Certificate

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Loadlock designs and methods for using same

Material or article handling – Apparatus for moving material between zones having different...
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Profile ID: LFUS-PAI-P-3309440

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