4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Chiung-Han Yeh

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Integrating a first contact structure in a gate last process

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Method for tuning a work function of high-k metal gate devices

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Photoresist etch back method for gate last process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Spacer shape engineering for void-free gap-filling process

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-2252562

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