Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
Arc-sprayed shield for pre-sputter etching chamber
Automatic supervision system on the ion beam map for ion implant
Intelligent supervision system with expert system for ion implan
Sputter etching chamber having a gas baffle with improved unifor
Sputter etching chamber with improved uniformity
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Profile ID: LFUS-PAI-P-899645